Investigation of abrasive-free slurry for polysilicon buffing chemical mechanical planarization

Publication date: 15 June 2021Source: Materials Science in Semiconductor Processing, Volume 128Author(s): Sanghuck Jeon, Jiah Hong, Seokjun Hong, Chaitanya Kanade, Kihong Park, Hyunho Seok, Hojoong Kim, Sunyoung Lee, Taesung Kim
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research