Synthesis of molybdenum-doped rhenium disulfide alloy using aerosol-assisted chemical vapour deposition

Publication date: 1 June 2021Source: Materials Science in Semiconductor Processing, Volume 127Author(s): Naktal Al-Dulaimi, Mundher Al-Shakban, Edward A. Lewis, Paul D. McNaughter, Firoz Alam, Sarah J. Haigh, David J. Lewis
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research