Influence of the PALE growth temperature on quality of MOVPE grown AlN/Si (111)

Publication date: 1 June 2021Source: Materials Science in Semiconductor Processing, Volume 127Author(s): Ismail Altuntas, Merve Nur Kocak, Gamze Yolcu, Hasan Feyzi Budak, A. Emre Kasapoğlu, Sabit Horoz, Emre Gür, Ilkay Demir
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research