[ASAP] Growth-Etch Metal –Organic Chemical Vapor Deposition Approach of WS < sub > 2 < /sub > Atomic Layers

ACS NanoDOI: 10.1021/acsnano.0c05394

Source: ACS Nano - December 24, 2020 Category: Nanotechnology Authors: Assael Cohen, Avinash Patsha, Pranab K. Mohapatra, Miri Kazes, Kamalakannan Ranganathan, Lothar Houben, Dan Oron, and Ariel Ismach Source Type: research