Effect of RF sputtering power and vacuum annealing on the properties of AZO thin films prepared from ceramic target in confocal configuration

Publication date: 1 November 2020Source: Materials Science in Semiconductor Processing, Volume 118Author(s): Fatiha Challali, Djelloul Mendil, Tahar Touam, Thierry Chauveau, Valérie Bockelée, Alexis Garcia Sanchez, Azeddine Chelouche, Marie-Paule Besland
Source: Materials Science in Semiconductor Processing - Category: Materials Science Source Type: research