Synergistic effect of composite complex agent on BTA removal in post CMP cleaning of copper interconnection

Publication date: Available online 24 May 2020Source: Materials Chemistry and PhysicsAuthor(s): Da Yin, Liu Yang, Tengda Ma, Yi Xu, Baimei Tan, Fan Yang, Xiaoqin Sun, Mengrui Liu
Source: Materials Chemistry and Physics - Category: Materials Science Source Type: research