Fast template matching method in white-light scanning interferometry for 3D micro-profile measurement

White-light scanning interferometry (WLSI) is an important measurement technique that has been widely used in three-dimensional profile ...

Source: Applied Optics - January 24, 2020 Category: Physics Authors: Yiliang Huang Jian Gao Lanyu Zhang Haixiang Deng Xin Chen Source Type: research