Method of calculating the aberrations of soft X-ray and vacuum ultraviolet optical systems

Based on the the third-order aberration theory of plane-symmetric optical systems, this paper studies the effect on aberrations of the second-order accuracy of aperture-ray coordinates and the extrinsic aberrations of this kind of optical system; their calculation expressions are derived. The resultant aberration expressions are then applied to calculate the aberrations of two design examples of soft X-ray and vacuum ultraviolet (XUV) optical systems; images are compared with ray-tracing results using SHADOW software to validate the aberration expressions. The study shows that the accuracy of the aberration expressions is satisfactory.

Source: Journal of Synchrotron Radiation - July 31, 2019 Category: Physics Authors: Cao, Y. Shen, Z. Zheng, Z. Tags: soft X-ray and vacuum ultraviolet intrinsic aberrations extrinsic aberrations synchrotron optics optical design research papers Source Type: research