Diamond nanofocusing refractive X-ray lenses made by planar etching technology

The manufacturing steps and first tests of a refractive lens made of polycrystalline diamond are described. A fabrication process based on electron-beam lithography and deep reactive ion etching is introduced. Experimental tests on beamline ID13 at the ESRF have been performed. A spot size of 360   nm (FWHM) at an energy E = 24.3   keV is observed.

Source: Journal of Synchrotron Radiation - July 31, 2019 Category: Physics Authors: Lyubomirskiy, M. Boye, P. Feldkamp, J.M. Patommel, J. Schoeder, S. Schropp, A. Burghammer, M. Wild, C. Schroer, C.G. Tags: diamond X-ray lenses compound refractive lens (CRL) focusing research papers Source Type: research