Hybrid height and slope figuring method for grazing-incidence reflective optics

In this study, a novel 2D slope-based figuring method is proposed, which employs an alternating objective optimization on the slopes in the x- and y-directions directly. An analytical simulation revealed that the slope-based method achieved smaller residual slope errors than the height-based method, while the height-based method achieved smaller residual height errors than the slope-based method. Therefore, a hybrid height and slope figuring method was proposed to further enable explicit control of both the height and slopes according to the final mirror specifications. An experiment to finish an elliptical-cylindrical mirror using the hybrid method with ion beam figuring was then performed. Both the residual height and slope errors converged below the specified threshold values, which verified the feasibility and effectiveness of the   proposed ideas.

Source: Journal of Synchrotron Radiation - December 2, 2022 Category: Physics Authors: Wang, T. Huang, L. Ke, X. Zhu, Y. Choi, H. Pullen, W. Negi, V. Kim, D. Idir, M. Tags: ion beam figuring synchrotron optics two-dimensional surface slopes research papers Source Type: research