μ-Si strain gauge array on flexible substrate for dynamic pressure measurement

Publication date: 1 November 2020Source: Sensors and Actuators A: Physical, Volume 315Author(s): Fatima Garcia Castro, Olivier de Sagazan, Nathalie Coulon, Antoni Homs Corbera, Dario Fassini, Jeremy Cramer, France Le Bihan

Source: Sensors and Actuators A: Physical - September 7, 2020 Category: Physics Source Type: research