Chip-scale sputter-ion pump operates at sub-torr levels

Roger Engelke Jr. A micro-scale sputter-ion vacuum pump for extremely low pressures, developed by researchers at the Univ. of Michigan’s Electrical and Computer Engineering (ECE) group within the Dept. of Electrical Engineering and Computer Science, may greatly extend the capabilities of devices such as gas analyzers for healthcare and homeland security. read more
Source: Articles from MedicalDesign.com - Category: Medical Equipment Tags: Products Source Type: news