On-chip membrane-based GaInAs/InP waveguide-type p-i-n photodiode fabricated on silicon substrate

Toward the realization of ultralow-power-consumption on-chip optical interconnection, two types of membrane-based GaInAs/InP p-i-n photodiodes were fabricated on Si host substrates by using benzocyclobutene bonding. A responsivity of 0.95   A/W was estimated with a conventional waveguide-type ...

Source: Applied Optics - September 22, 2017 Category: Physics Authors: Zhichen Gu Tatsuya Uryu Nagisa Nakamura Daisuke Inoue Tomohiro Amemiya Nobuhiko Nishiyama Shigehisa Arai Source Type: research