High-speed and high-precision measurement of biaxial in-plane displacements: tens of nanometers principle error suppression in microprobe sensors

When the microprobe sensor is faced with the demand of high-speed biaxial displacement measurement, due to the characteristics of phase ...

Source: Optics Express - April 10, 2024 Category: Physics Authors: Yisi Dong Jinran Zhang Haijin Fu Chen Zhang Wenwen Li Wenrui Luo Ruitao Yang Hongxing Yang Pengcheng Hu Source Type: research