Point field emission electron source with a magnetically focused electron beam

Ultramicroscopy. 2023 Dec 21;258:113911. doi: 10.1016/j.ultramic.2023.113911. Online ahead of print.ABSTRACTThis paper presents a field emitter in the form of a silicon tip covered with a layer of carbon nanotubes. The emitted beam is focused with a set of two electrostatic lenses and - which is novelty in such structures - with a magnetic field. The presented approach gave very promising results. The field emitter was able to provide a high emission current (about 50 µA) and a beam with a small and homogeneous spot. Such electron sources are necessary components of many miniature MEMS and nanoelectronics devices. The presented source is dedicated especially for the use in currently developed MEMS X-ray sources and MEMS electron microscopes.PMID:38181619 | DOI:10.1016/j.ultramic.2023.113911
Source: Ultramicroscopy - Category: Laboratory Medicine Authors: Source Type: research