Generational assessment of EBSD detectors for cross-correlation-based analysis: From scintillators to direct detection

In this study, we assess the efficacy of multiple generations of electron detectors for cross-correlation-based analysis using a single crystal Si sample as a reference. We show that, while improvements in precision are modest, there have been significant gains in the rate at which high-quality diffraction patterns can be collected. This has important implications in the size of datasets that can be collected and reduces the impact of drift and sample contamination.PMID:38141535 | DOI:10.1016/j.ultramic.2023.113913
Source: Ultramicroscopy - Category: Laboratory Medicine Authors: Source Type: research