[ASAP] Dysprosium Incorporation for Phase Stabilization of Atomic-Layer-Deposited HfO < sub > 2 < /sub > Thin Films

Chemistry of MaterialsDOI: 10.1021/acs.chemmater.2c02862

Source: Chemistry of Materials - March 16, 2023 Category: Materials Science Authors: Yujin Lee, Kangsik Kim, Zonghoon Lee, Hong-Sub Lee, Han-Bo-Ram Lee, Woo-Hee Kim, Il-Kwon Oh △, and Hyungjun Kim Source Type: research