The optical emission spectroscopy of nitrogen plasma driven by the 94.92 MHz/13.56 MHz dual-frequency

Publication date: Available online 3 March 2020Source: Physics Letters AAuthor(s): Qianghua Yuan, Pei Ren, Shanshan Liu, Jingjing Wang, Guiqin Yin

Source: Physics Letters A - March 4, 2020 Category: Physics Source Type: research