Sensors, Vol. 19, Pages 4260: On-Chip Non-Dispersive Infrared CO2 Sensor Based On an Integrating Cylinder

Sensors, Vol. 19, Pages 4260: On-Chip Non-Dispersive Infrared CO2 Sensor Based On an Integrating Cylinder
Sensors doi: 10.3390/s19194260
Authors:
Xiaoning Jia
Joris Roels
Roel Baets
Gunther Roelkens

In this paper, we propose a novel, miniaturized non-dispersive infrared (NDIR) CO2 sensor implemented on a silicon chip. The sensor has a simple structure, consisting of a hollow metallic cylindrical cavity along with access waveguides. A detailed analysis of the proposed sensor is presented. Simulation with 3D ray tracing shows that an integrating cylinder with 4 mm diameter gives an equivalent optical path length of 3 . 5 cm. The sensor is fabricated using Deep Reactive Ion Etching (DRIE) and wafer bonding. The fabricated sensor was evaluated by performing a CO2 concentration measurement, showing a limit of detection of ∼100 ppm. The response time of the sensor is only ∼2.8 s, due to its small footprint. The use of DRIE-based waveguide structures enables mass fabrication, as well as the potential co-integration of flip-chip integrated midIR light-emitting diodes (LEDs) and photodetectors, resulting in a compact, low-power, and low-cost NDIR CO2 sensor.

Source: Sensors - September 29, 2019 Category: Biotechnology Authors: Xiaoning Jia Joris Roels Roel Baets Gunther Roelkens Tags: Article Source Type: research