Stitching interferometry using alternating calibration of positioning and systematic errors

Stitching interferometry is an essential technique for the non-contact, high-precision measurement of large apertures or complex optical ...

Source: Optics Express - April 18, 2024 Category: Physics Authors: Yi Zong Caiyun Yu Weijian Liu Yixuan Liu Yongshen Zhong Huitong Huang Mingliang Duan Jianxin Li Source Type: research