Modifying single-crystal silicon and trimming silicon microring devices by femtosecond laser irradiation

Single-crystal silicon (c-Si) is a vital component of photonic devices and has obvious advantages. Moreover, femtosecond-pulsed laser ...

Source: Optics Express - April 18, 2024 Category: Physics Authors: Jia Du Libing Zhou Weixiao Xu Yuanan Zhao MingZhe Chen BoYu Zhang Weibiao Chen Source Type: research