Incoherent partial superposition modeling for single-shot angle-resolved ellipsometry measurement of thin films on transparent substrates

Ellipsometric measurement of transparent samples suffers from substrate backside reflection challenges, including incoherent and partial ...

Source: Optics Express - April 15, 2024 Category: Physics Authors: Lihua Peng Jian Wang Feng Gao Jun Zhang Wenzheng Zhai Liping Zhou Xiangqian Jiang Source Type: research