ZrN films with low resistivity under different chamber pressure by MOCVD

CrystEngComm, 2024, Accepted Manuscript DOI: 10.1039/D3CE01273E, PaperQingqing Chen, Chengming Li, Shaoyan Yang, Huijie Li, Rui Yang, Weizhen Yao, Hongyuan Wei, Xianglin Liu The transitional metal nitride ZrN is known for its exceptional electrical conductivity and ability to display metallic and semiconducting properties by manipulating its stoichiometric ratio. As such, it has garnered... The content of this RSS Feed (c) The Royal Society of Chemistry

Source: RSC - CrystEngComm latest articles - February 15, 2024 Category: Chemistry Authors: Qingqing Chen Source Type: research