[ASAP] CFD Simulation of the Dosing Behavior within the Atomic Layer Deposition Feeding System

Industrial& Engineering Chemistry ResearchDOI: 10.1021/acs.iecr.3c01151

Source: Industrial and Engineering Chemical Research - June 1, 2023 Category: Chemistry Authors: Yuchen Yuan, Huihui Ping, Dennis T. Lee, Peter Corkery, Zhen Zhang, Cui Liu, Shuang-mei Xue, Liwei Zhuang, and Michael Tsapatsis Source Type: research