Sub-pixel position estimation algorithm based on Gaussian fitting and sampling theorem interpolation for wafer alignment

Wafer alignment is the core technique of lithographic tools. Image-processing-based wafer alignment techniques are commonly used in ...

Source: Applied Optics - October 20, 2021 Category: Physics Authors: Songyong Pan Shaoqing Wang Jinghao Xu Lili Fan Fenghua Yuan Ting Shu Fengzhao Dai Xiaona Yan Yang Bu Xiangzhao Wang Source Type: research