[ASAP] Surface Diffusion Control Enables Tailored-Aspect-Ratio Nanostructures in Area-Selective Atomic Layer Deposition

ACS Applied Materials& InterfacesDOI: 10.1021/acsami.0c22121

Source: ACS Applied Materials and Interfaces - April 15, 2021 Category: Materials Science Authors: Philip Klement, Daniel Anders, Lukas Gu ̈mbel, Michele Bastianello, Fabian Michel, Jörg Schörmann, Matthias T. Elm, Christian Heiliger, and Sangam Chatterjee Source Type: research