Synergetic effect of H2O2 and PTA on the microscratch and indentation of GaN wafer with electricity

Publication date: Available online 20 February 2021Source: Tribology InternationalAuthor(s): Huaijun Guan, Shiwei Niu, Yongguang Wang, Xiaolong Lu, Zhao Ding, Weiwei Liu, Dong Zhao
Source: Tribology International - Category: Materials Science Source Type: research