[ASAP] One Nanometer Wide Functional Patterns with a Sub-10 Nanometer Pitch Transferred to an Amorphous Elastomeric Material

ACS NanoDOI: 10.1021/acsnano.0c08741

Source: ACS Nano - January 7, 2021 Category: Nanotechnology Authors: Tyson C. Davis, Jeremiah O. Bechtold, Anni Shi, Erin N. Lang, Anamika Singh, and Shelley A. Claridge Source Type: research