Study on Machining Characteristics of Magnetically Controlled Laser Induced Plasma Micro-machining Single-crystal Silicon

Publication date: Available online 15 December 2020Source: Journal of Advanced ResearchAuthor(s): Yanming Zhang, Zhen Zhang, Yi Zhang, Denghua Liu, Jie Wu, Yu Huang, Guojun Zhang

Source: Journal of Advanced Research - December 15, 2020 Category: Research Source Type: research