Science and Technology of Integrated Super-High Dielectric Constant AlOx/TiOy Nanolaminates / Diamond for MOS Capacitors and MOSFETs

Publication date: February 2021Source: Carbon, Volume 172Author(s): Jiangwei Liu, Orlando Auciello, Elida de Obaldia, Bo Da, Yasuo Koide
Source: Carbon - Category: Materials Science Source Type: research