ICP-CVD μ-Si Layers Optimization for Strain Gauges on Flexible Substrates

Publication date: 1 November 2020Source: Sensors and Actuators A: Physical, Volume 315Author(s): Fatima Garcia Castro, Olivier de Sagazan, Nathalie Coulon, Claude Simon, France Le Bihan

Source: Sensors and Actuators A: Physical - September 2, 2020 Category: Physics Source Type: research