µ-Si strain gauge array on flexible substrate for dynamic pressure measurement

Publication date: Available online 29 August 2020Source: Sensors and Actuators A: PhysicalAuthor(s): Fatima Garcia Castro, Olivier de Sagazan, Nathalie Coulon, Antoni Homs Corbera, Dario Fassini, Jeremy Cramer, France Le Bihan

Source: Sensors and Actuators A: Physical - August 31, 2020 Category: Physics Source Type: research