A Digital Force-to-Rebalance Scheme for High-Frequency Bulk-Acoustic-Wave Micro-Gyroscopes

Publication date: Available online 29 June 2020Source: Sensors and Actuators A: PhysicalAuthor(s): Chong Li, Haoran Wen, Hua Chen, Farrokh Ayazi
Source: Sensors and Actuators A: Physical - Category: Physics Source Type: research
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