Heterodyne period measurement in a scanning beam interference lithography system

The interference fringe period is an important phase-locking
parameter in the scanning beam interference lithography (SBIL) system. ...

Source: Applied Optics - July 1, 2020 Category: Physics Authors: Shan Jiang Bo L ü Ying Song Zhaowu Liu Wei Wang Li Shuo Bayanheshig Source Type: research