Integrated UV-based Photo microreactor-distillation Technology Toward Process Intensification of Continuous Ultra-high-purity Electronic-grade Silicon Tetrachloride Manufacture

Publication date: Available online 24 June 2020Source: Chinese Journal of Chemical EngineeringAuthor(s): Ye WAN, Wen-hui GUO, Jin XIAO, Da-zhou YAN, Xiong ZHAO, Shu-hu GUO, Jian-hua LIU, Qi-fan ZHONG, Tao YANG, Yu ZHAO, Xin CHANG, Xin GAO

Source: Chinese Journal of Chemical Engineering - June 24, 2020 Category: Chemistry Source Type: research