A two-axis water-immersible micro scanning mirror using hybrid polymer and elastomer hinges
Publication date: Available online 30 May 2020Source: Sensors and Actuators A: PhysicalAuthor(s): Xiaoyu Duan, Shuangliang Li, Anthony Medellin, Chao Ma, Jun Zou
Source: Sensors and Actuators A: Physical - Category: Physics Source Type: research