Enlarging focal depth using epsilon-near-zero metamaterial for plasmonic lithography

Plasmonic lithography can utilize evanescent waves to produce subdiffraction patterns. However, the high loss and shallow depth of patterns ...

Source: Optics Letters - May 29, 2020 Category: Physics Authors: Qijian Jin Gaofeng Liang Gang Chen Fen Zhao Shaokui Yan Kun Zhang Mengyu Yang Qi Zhang Zhongquan Wen Zhihai Zhang Source Type: research