[ASAP] Elucidating the Evolving Atomic Structure in Atomic Layer Deposition Reactions with in Situ XANES and Machine Learning

Chemistry of MaterialsDOI: 10.1021/acs.chemmater.9b03025

Source: Chemistry of Materials - November 4, 2019 Category: Materials Science Authors: Orlando Trejo ¶†, Anup L. Dadlani¶‡, Francisco De La Paz§, Shinjita Acharya§, Rob Kravec?, Dennis Nordlund?, Ritimukta Sarangi?, Fritz B. Prinz§#, Jan Torgersen‡, and Neil P. Dasgupta*† Source Type: research