[ASAP] Amorphous IGZO TFT with High Mobility of ~70 cm < sup > 2 < /sup > /(V s) via Vertical Dimension Control Using PEALD

ACS Applied Materials& InterfacesDOI: 10.1021/acsami.9b14310

Source: ACS Applied Materials and Interfaces - October 17, 2019 Category: Materials Science Authors: Jiazhen Sheng †, TaeHyun Hong†, Hyun-Mo Lee†, KyoungRok Kim†, Masato Sasase‡, Junghwan Kim*‡, Hideo Hosono‡, and Jin-Seong Park*† Source Type: research