Improved ethanol vapor sensing properties of sputtered ZnO films by doping Ta

Publication date: Available online 30 September 2019Source: Materials Today CommunicationsAuthor(s): Xu Huang, Cuiping Li, Lirong Qian, Mingji Li, Hongji Li, Xue Chen Niu, Baohe YangAbstractPure ZnO and Ta doped ZnO films were prepared by magnetron sputtering and characterized by various techniques. The results indicated that Ta element was successfully doped in ZnO film. The grain size was decreased and the defect concentration was increased by the doping of Ta. The gas sensing test showed that the Ta dopants not only enhanced the response but also decreased the response/recovery time and improved the selectivity. The improvement in the gas sensing properties was ascribed to the modification in surface properties and the increase of defects due to the doping of Ta dopant.
Source: Materials Today Communications - Category: Materials Science Source Type: research