Sensors, Vol. 19, Pages 4248: Magnetic Sensing Properties of PVD Carbon Films Containing Vertically Aligned Crystallites

In this study, carbon films with vertically aligned nano-crystallites were obtained by a plasma-assisted physical vapor deposition (PVD) method. Basic test circuits were built on the films, and the sensing properties were investigated in external magnetic fields with different intensities and relative angles to the films surface. The results showed that the carbon-based sensing devices were capable to work in the temperature region of 250–400 K. The minimum field intensity and angle change to which the device can respond were 1 mT and 2°. By substrate-introduced enhancement, the maximum changing-rate of the film resistance could reach to 1100%/T. This research pointed out a practical and simple way to build magnetic sensors with PVD carbon films.
Source: Sensors - Category: Biotechnology Authors: Tags: Article Source Type: research