Tailoring the phase fractions by tuning the pulse frequency in stainless steel films obtained from an 316L target by pulsed-DC magnetron sputtering

Publication date: Available online 17 July 2018Source: Materials LettersAuthor(s): Marcus V.F. Schroeder, Abel A.C. Recco, Carlos M. GarzónAbstractStainless steel films were obtained from an 316L target onto steel substrates by pulsed-DC magnetron sputtering, varying the pulse frequency from non-pulsed (conventional DC) up to 350 kHz. Experiments were carried out with a substrate temperature of 673 K and time-averaged electrical power density of 15.3 Wcm-2. Stabilization of the face-centered cubic, but not the body-centered cubic phase was observed under pulsed-DC compared to conventional DC. This was attributed to increased average adatom energy under pulsed-DC.Graphical abstract
Source: Materials Letters - Category: Materials Science Source Type: research