A scanning transmission X-ray microscope at the Pohang Light Source

A scanning transmission X-ray microscope is operational at the 10A beamline at the Pohang Light Source. The 10A beamline provides soft X-rays in the photon energy range 100 – 2000   eV using an elliptically polarized undulator. The practically usable photon energy range of the scanning transmission X-ray microscopy (STXM) setup is from ∼ 150 to ∼ 1600   eV. With a zone plate of 25   nm outermost zone width, the diffraction-limited space resolution, ∼ 30   nm, is achieved in the photon energy range up to ∼ 850   eV. In transmission mode for thin samples, STXM provides the element, chemical state and magnetic moment specific distributions, based on absorption spectroscopy. A soft X-ray fluorescence measurement setup has been implemented in order to provide the elemental distribution of thicker samples as well as chemical state information with a space resolution of ∼ 50   nm. A ptychography setup has been implemented in order to improve the space resolution down to 10   nm. Hardware setups and application activities of the STXM are presented.

Source: Journal of Synchrotron Radiation - March 15, 2018 Category: Physics Authors: Shin, H.-J. Kim, N. Kim, H.-S. Lee, W.-W. Lee, C.-S. Kim, B. Tags: STXM spectronanoscopy spectromicroscopy soft X-ray fluorescence beamlines Source Type: research