Line-scanning laser scattering system for fast defect inspection of a large aperture surface

Inspection of defects with micrometer level on large aperture surfaces with hundreds of millimeters is one of the challenges in surface quality evaluation. Various microscopic imaging methods have been applied to inspecting the surface defects, while they are time-consuming for the small field of ...

Source: Applied Optics - August 23, 2017 Category: Physics Authors: Jingtao Dong Source Type: research